Home > Conference materials > Papers > Plasma study during pulsed laser deposition of nanocrystalline diamond/amorphous carbon composite thin films and their structural characterization
Original title:
Plasma study during pulsed laser deposition of nanocrystalline diamond/amorphous carbon composite thin films and their structural characterization
Translated title:
Studium plazmatu během pulsní laserové depozice kompozitních vrstev nanokrystalického diamantu/amorfního uhlíku a jejich strukturní vlastnosti
Authors:
Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Vorlíček, Vladimír ; Mosnier, J.-P. ; Duclére, J.-R. ; Popov, C. Document type: Papers Conference/Event: NANO ´04 International Conference, Brno (CZ), 2004-10-13 / 2004-10-15
Year:
2004
Language:
eng Abstract:
[eng][cze] Nanocrystalline diamond/amorphous carbon composite thin films were prepared by hybrid technique combining pulsed laser deposition with a capacitively coupled radiofrequency discharge. Optical emission spectroscopy was performed for plasma monitoring during the deposition process.Kompozitní vrstvy nanokrystalického diamantu/amorfního uhlíku byly připravovány pomocí hybridní pulsní laserové depozice s kombinací radiofrekvenčního výboje. Depoziční proces byl monitorován pomocí optické emisní spektroskopie.
Keywords:
nanocrystalline diamond; optical emission spectroscopy; pulsed laser deposition Project no.: CEZ:AV0Z1010921 (CEP), IAA1010110 (CEP), LN00A015 (CEP) Funding provider: GA AV ČR, GA MŠk Host item entry: NANO ´04, ISBN 80-214-2793-0
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0164184