Original title: Plasma study during pulsed laser deposition of nanocrystalline diamond/amorphous carbon composite thin films and their structural characterization
Translated title: Studium plazmatu během pulsní laserové depozice kompozitních vrstev nanokrystalického diamantu/amorfního uhlíku a jejich strukturní vlastnosti
Authors: Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Vorlíček, Vladimír ; Mosnier, J.-P. ; Duclére, J.-R. ; Popov, C.
Document type: Papers
Conference/Event: NANO ´04 International Conference, Brno (CZ), 2004-10-13 / 2004-10-15
Year: 2004
Language: eng
Abstract: [eng] [cze]
Nanocrystalline diamond/amorphous carbon composite thin films were prepared by hybrid technique combining pulsed laser deposition with a capacitively coupled radiofrequency discharge. Optical emission spectroscopy was performed for plasma monitoring during the deposition process. Kompozitní vrstvy nanokrystalického diamantu/amorfního uhlíku byly připravovány pomocí hybridní pulsní laserové depozice s kombinací radiofrekvenčního výboje. Depoziční proces byl monitorován pomocí optické emisní spektroskopie.
Keywords: nanocrystalline diamond; optical emission spectroscopy; pulsed laser deposition
Project no.: CEZ:AV0Z1010921 (CEP), IAA1010110 (CEP), LN00A015 (CEP)
Funding provider: GA AV ČR, GA MŠk
Host item entry: NANO ´04, ISBN 80-214-2793-0

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0164184

Permalink: http://www.nusl.cz/ntk/nusl-39199


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers