Original title: Grazing incidence interferometer for form measurement of hollow cylinders
Authors: Šarbort, Martin ; Řeřucha, Šimon ; Holá, Miroslava ; Lazar, Josef
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Year: 2018
Language: eng
Abstract: Optical metrology of cylindrical specimens represents an interesting task in scientific and\nindustrial practice. The most precise measurement methods use principles of laser\ninterferometry where the phase difference between the reference wave and the object wave reflected from the tested surface is detected. The form measurement of hollow cylindrical tubes can be advantageously realized by an object wave with conical wavefronts generated by an axicon lens or an equivalent diffractive optical element. An axicon characterized by large apex angle forms a conical wave that fulfills the conditions of the grazing incidence, which results in suppression of the speckle noise. The previous experimental setups were relatively complex since they involved a pair of mutually reversed axicons or a pair of diffractive optical elements that transform the object wave from planar to conical and vice\nversa.
Keywords: hollow cylinders; interferometry; surface metrology
Project no.: TE01020233 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA MŠk, GA MŠk
Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0287635

Permalink: http://www.nusl.cz/ntk/nusl-387516


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers