Original title: Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems
Authors: Domonkos, Mária ; Ižák, Tibor ; Stolcova, L. ; Proška, J. ; Kromka, Alexander
Document type: Papers
Conference/Event: 5th International Conference Nanocon 2013, Brno (CZ), 20131016
Year: 2014
Language: eng
Abstract: In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). It was found out that choosing optimal parameters results in a tunable diameter of PM with various shapes (from spheres to pyramid-like structures) while keeping their periodic hexagonal ordering.
Keywords: Langmuir-Blodgett monolayers; nanosphere lithography; polystyrene microspheres; pulsed linear-antenna microwave plasma; reactive ion etching
Project no.: GAP108/12/0910 (CEP)
Funding provider: GA ČR
Host item entry: NANOCON 2013 - 5th International Conference Proceedings, ISBN 978-80-87294-47-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0281147

Permalink: http://www.nusl.cz/ntk/nusl-371574

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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
 Record created 2018-03-07, last modified 2020-03-27

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