Original title: The intrinsic submicron ZnO thin films prepared by reactive magnetron sputtering
Authors: Remeš, Zdeněk ; Stuchlík, Jiří ; Purkrt, Adam ; Chang, Yu-Ying ; Jirásek, Vít ; Štenclová, Pavla ; Prajzler, V. ; Nekvindová, P.
Document type: Papers
Conference/Event: NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./, Brno (CZ), 20161019
Year: 2017
Language: eng
Abstract: The DC reactive magnetron sputtering of metallic target in oxide atmosphere is a simple method of depositing the intrinsic (undoped) nanocrystalline layers of metal oxides. We have optimized the deposition of the intrinsic ZnO thin films with submicron thickness 50-500 nm on fused silica glass substrates and investigated the localized defect states below the optical absorption edge down to 0.01 % using photothermal deflection spectroscopy from UV to IR. We have shown that the defect density, the optical absorptance and the related optical attenuation in planar waveguides can be significantly reduced by annealing in air at 400 °C.
Keywords: optical spectroscopy; photothermal deflection spectroscopy; plasma treatment; reactive magnetron sputtering; ZnO
Project no.: GC16-10429J (CEP), KONNECT-007
Funding provider: GA ČR, AV ČR
Host item entry: NANOCON 2016 8th International Conference on Nanomaterials - Research & Application. Conference proceedings, ISBN 978-80-87294-71-0
Note: Související webová stránka: https://www.nanocon.eu/cz/sbornik-nanocon-2016/

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0274448

Permalink: http://www.nusl.cz/ntk/nusl-364667

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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
 Record created 2017-10-04, last modified 2019-10-20

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