Název: Structural Colors of Self-Similar Nano Patterns
Autoři: Meluzín, Petr ; Horáček, Miroslav ; Krátký, Stanislav ; Kolařík, Vladimír
Typ dokumentu: Příspěvky z konference
Konference/Akce: NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./, Brno (CZ), 20161019
Rok: 2017
Jazyk: eng
Abstrakt: E-beam lithography is a flexible technology for various diffraction gratings origination. The e-beam patterning typically allows for the creation of optical diffraction gratings in the first diffraction order. However, the very high resolution enables also the patterning of structures providing the zero-order diffraction. Recently, we presented a work on the structural colors of metallic layers covering both regular-line structures and CGH (computer generated hologram) structures. This work presents a study dealing with zero-order diffraction structures with self-similar properties. The practical part of the work is focused on two aspects: design parameters and technological issues. Variations in design parameters include the tone of the structure (positive or negative),\nthe density of filling, the filling factor, and the depth of the structures. The achieved gamut of colors may by primarily extended by the proper selection of metal deposition technology and its parameters, and further by the proper selection of the metal and the thickness of its layer, these are the technological issues.
Klíčová slova: diffraction grating; e-beam writer; nano patterning; self similarity
Číslo projektu: TE01020233 (CEP), LO1212 (CEP), ED0017/01/01
Poskytovatel projektu: GA TA ČR, GA MŠk, GA MŠk
Zdrojový dokument: NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings, ISBN 978-80-87294-71-0

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0270767

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-264736


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference