Název: Correction of misalignment aberrations of a hexapole corrector using the differential algebra method
Autoři: Radlička, Tomáš ; Oral, Martin
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Rok: 2016
Jazyk: eng
Abstrakt: Overcoming the limitations of the Schertzer theorem is a long story in electron microscopy. Although the basic principle of a spherical aberration (C3) correction was suggested as early as in 1947 the first experimental correctors of spherical aberration were only realized in the last decade of the 20th century. The recent multipole correctors are designed for high-energy\nTEM or STEM, where the corrector system enables reaching the atomic resolution. On the other\nhand, the corrector for low-energy SEM has been developed but this type of corrector must also contain chromatic aberration (Cc) correction to reduce the effect of the non-zero energy width. Recently, the energies of SEM reach 30 keV and transmission mode (TSEM) is a standard part of the instrument. Standard resolution in TSEM is about 0.6 nm and it is limited by C3. Reaching atomic resolution with this set-up is not a real expectation because of its instability, but the resolution of about 0.2 nm would increase the field of applications. Corrector for these type of instruments should be (a) simple, compact and cheap (b) only spherical aberration of the third,\noptionally the fifth order must be corrected (c) effect of the chromatic aberration may be reduced by energy filtering. We studied design based on Rose’s hexapole corrector.
Klíčová slova: electron microscopy; Schertzer theorem; STEM; TEM
Číslo projektu: LO1212 (CEP), ED0017/01/01, 7H13015 (CEP)
Poskytovatel projektu: GA MŠk, GA MŠk, GA MŠk
Zdrojový dokument: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Poznámka: Související webová stránka: http://www.trends.isibrno.cz/

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0260342

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-253630


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference