Original title: Scanning transmission microscopy at very low energies
Authors: Müllerová, Ilona ; Mikmeková, Eliška ; Konvalina, Ivo ; Frank, Luděk
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: To operate down to units of eV with a small primary spot size, a cathode lens with a biased specimen was introduced into the SEM. The reflected signal, accelerated secondary and backscattered electrons, is collected by detectors situated above the specimen.\nWhen we insert a detector below the specimen, the transmitted electron signal can also be used for imaging down to zero energy. Fig. 1 also shows an example of the simulated signal trajectories of electrons that impact on the detector of reflected electrons, based on an Yttrium Aluminium Garnet (YAG) crystal, and trajectories of electrons transmitted through the specimen and incident on a semiconductor detector based on the PIN structure.
Keywords: electron microscopy; SEM
Project no.: TE01020118 (CEP), LO1212 (CEP)
Funding provider: GA TA ČR, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260338

Permalink: http://www.nusl.cz/ntk/nusl-253626


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers