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Original title:
Determination of drift distortion in SEM micrographs acquired at different magnifications and acquisition times
Authors: Petráňová, Veronika ; Koudelka_ml., Petr ; Valach, Jaroslav
Document type: Papers
Conference/Event: Youth symposium on experimental solid mechanics /13./, Děčín (CZ), 2014-06-29 / 2014-07-02
Year: 2014
Language: eng
Abstract: In the experimental mechanics wide variety of optical methods including measurement of deformation at reduced length scales using combination of computer vision and scanning electron microscopy (SEM) have been recently applied. One of suitable methods for in-plane measurement of displacements and deformations in the micrographs obtained by SEM is the 2D digital image correlation. In contrast to images obtained in visible spectrum by classical optical devices temporally-varying distortions known as drift distortion are present in the SEM micrographs. These distortions are caused by positional errors of electron beam during scanning process. Magnitude of this effect decreases with higher conductivity of the sample and is also influenced by magnification and scanning time. For this purpose measurement of distortion was performed on a series of micrographs of conductive samples acquired at different magnifications and acquisition times. Surface of each sample was covered with liquid silver to ensure adequate contrast pattern necessary for determination of distortion’s magnitude and distortion magnitudes were assessed.
Keywords: digital image correlation; drift distortion; scanning electron microscopy
Project no.: GBP105/12/G059 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of XIIIth youth symposium on experimental solid mechanics, ISBN 978-80-01-05556-4
Institution: Institute of Theoretical and Applied Mechanics AS ČR (web)
Document availability information: Fulltext is available at external website.
External URL: http://www.itam.cas.cz/ysesm2014/proceedings/id_2_ysesm2014_proceedings.pdf
Original record: http://hdl.handle.net/11104/0237205
Permalink: http://www.nusl.cz/ntk/nusl-175722
The record appears in these collections:
Research > Institutes ASCR > Institute of Theoretical and Applied Mechanics
Conference materials > Papers
Authors: Petráňová, Veronika ; Koudelka_ml., Petr ; Valach, Jaroslav
Document type: Papers
Conference/Event: Youth symposium on experimental solid mechanics /13./, Děčín (CZ), 2014-06-29 / 2014-07-02
Year: 2014
Language: eng
Abstract: In the experimental mechanics wide variety of optical methods including measurement of deformation at reduced length scales using combination of computer vision and scanning electron microscopy (SEM) have been recently applied. One of suitable methods for in-plane measurement of displacements and deformations in the micrographs obtained by SEM is the 2D digital image correlation. In contrast to images obtained in visible spectrum by classical optical devices temporally-varying distortions known as drift distortion are present in the SEM micrographs. These distortions are caused by positional errors of electron beam during scanning process. Magnitude of this effect decreases with higher conductivity of the sample and is also influenced by magnification and scanning time. For this purpose measurement of distortion was performed on a series of micrographs of conductive samples acquired at different magnifications and acquisition times. Surface of each sample was covered with liquid silver to ensure adequate contrast pattern necessary for determination of distortion’s magnitude and distortion magnitudes were assessed.
Keywords: digital image correlation; drift distortion; scanning electron microscopy
Project no.: GBP105/12/G059 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of XIIIth youth symposium on experimental solid mechanics, ISBN 978-80-01-05556-4
Institution: Institute of Theoretical and Applied Mechanics AS ČR (web)
Document availability information: Fulltext is available at external website.
External URL: http://www.itam.cas.cz/ysesm2014/proceedings/id_2_ysesm2014_proceedings.pdf
Original record: http://hdl.handle.net/11104/0237205
Permalink: http://www.nusl.cz/ntk/nusl-175722
The record appears in these collections:
Research > Institutes ASCR > Institute of Theoretical and Applied Mechanics
Conference materials > Papers
Record created 2014-10-23, last modified 2023-12-06