Original title: Photolithographic technique for controlled fabrication of metal structures
Authors: Jusková, Petra ; Hegrová, Jitka ; Foret, František
Document type: Papers
Conference/Event: CECE 2012. International Interdisciplinary Meeting on Bioanalysis /9./, Brno (CZ), 2012-11-01 / 2012-11-02
Year: 2012
Language: eng
Abstract: We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer.
Keywords: metal microstructures; microfabrication; photolithography
Project no.: GAP301/11/2055 (CEP), GBP206/12/G014 (CEP)
Funding provider: GA ČR, GA ČR
Host item entry: CECE 2012. 9th International Interdisciplinary Meeting on Bioanalysis, ISBN 978-80-904959-1-3
Note: Související webová stránka: http://hdl.handle.net/11104/0215413

Institution: Institute of Analytical Chemistry AS ČR (web)
Document availability information: Fulltext is available in the digital repository of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215413

Permalink: http://www.nusl.cz/ntk/nusl-135552


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Research > Institutes ASCR > Institute of Analytical Chemistry
Conference materials > Papers