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Preparation of sample cross-sections and analysis by SIMS
Karlovský, Juraj ; Pechal, Radim (referee) ; Bábor, Petr (advisor)
This thesis studies possible methods of semiconductor sample measurement by SIMS, with emphasis on testing different measurement parameters and sample preparation. Part of this master thesis deals with the design of a modified sample holder compatible with the used ToF-SIMS$^{5}$ instrument, IONTOF company, which is capable of tilting the sample by defined angle. This holder enables sample preparation in the main chamber of the instrument without the need of transferring the sample between instruments, which limits the probability of sample contamination. This sample holder was tested by ion machining of TIGBT sample edge and by imaging of a crater edge, created in previous measurement. Edge termination structures prepared by different techniques were measured on the TIGBT samples. Further measurements with the goal of optimizing the depth resolution for thin layers were done on Molybdenum-Silicon-multilayer X-Ray Mirror. Part of the measurements was focused on comparing depth profiles measured at low temperatures. For these measurements the samples with Indium multilayers in GaN substrate were used.
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SDN Controlled According to User Identity
Holkovič, Martin ; Ryšavý, Ondřej (referee) ; Polčák, Libor (advisor)
The aim of this work is to connect dynamic identity management system developed under the project Sec6Net with a control of SDN network. The controller Pyretic is used for network control, which allows application development by using the match-action rules. Interface between the identity management system and controller Pyretic is designed and implemented in both systems. To prove the concept, selected use cases related to security, routing and accounting are created. The use cases are implemented as applications for Pyretic controller. All programs were tested in networking laboratory according to the possibilities. The main contribution of this work is to simplify and improve the management of computer networks while providing new capabilities to administrators of these networks and ultimately their users.
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Noise, Transport and Structural Properties of High Energy Radiation Detectors Based on CdTe
Šik, Ondřej ; Lazar, Josef (referee) ; Navrátil, Vladislav (referee) ; Grmela, Lubomír (advisor)
Poptávka ze strany vesmírného výzkumu, zdravotnictví a bezpečnostního průmyslu způsobila v posledních letech zvýšený zájem o vývoj materiálů pro detekci a zobrazování vysokoenergetického záření. CdTe a jeho slitina CdZnTe. jsou polovodiče umožnují detekci záření o energiích v rozsahu 10 keV až 500 keV. Šířka zakázaného pásma u CdTe / CdZnTe je 1.46 -1.6 eV, což umožňuje produkci krystalů o vysoké rezistivitě (10^10-10^11 cm), která je dostačující pro použití CdTe / CdZnTe při pokojové teplotě. V mé práci byly zkoumány detektory CdTe/CdZnTe v různých stádiích jejich poruchovosti. Byly použity velmi kvalitní spektroskopické detektory, materiál s nižší rezistivitou a výraznou polarizací, detektory s asymetrií elektrických parametrů kontaktů a teplotně degenerované vzorky. Z výsledků analýzy nízkofrekvenčního šumu je patrný obecný závěr, že zvýšená koncentrace defektů způsobí změnu povahy původně monotónního spektra typu 1/f na spektrum s výrazným vlivem generačně-rekombinačních procesů. Další výrazná vlastnost degenerovaných detektorů a detektorů nižší kvality je nárůst spektrální hustoty šumu typu 1/f se vzrůstajícím napájecím napětí se směrnicí výrazně vyšší než 2. Strukturální a chemické analýzy poukázaly, že teplotní generace detektorů způsobuje difuzi kovu použitého při kontaktování a stopových prvků hlouběji do objemu krystalu. Část mé práce je věnována modifikaci povrchu svazkem argonových iontů a jejímu vlivu na chemické složení a morfologii povrchu.
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Analysis and modification of thin layers using ion beams
Jonner, Jakub ; Lörinčík, Jan (referee) ; Bábor, Petr (advisor)
This diploma thesis deals with analysis and modification of thin layers using ion beams. The first part of this diploma thesis deals with phenomena accompanying ion beam bombardment of solid matter. The second part of this diploma thesis is concerned with Secondary Ion Mass Spectroscopy (SIMS) and Low Energy Ion Scattering (LAIS). This work convey some basic information about these two techniques and it also deals with some benefits result in their connection into parallel depth profiling mode (such as better depth resolution of the LEIS profile, quantification of the SIMS). These benefits are demonstrated on MoSi film measurement. Within the framework of this thesis a new UHV manipulator was designed. This new UHV manipulator is equipped with precise stepper UHV motor and since the proportions are smaller, the manipulation with a sample in a space limited UHV chamber is much more comfortable and more precise. The third part of this diploma thesis deals with ion-beam induced transformation of epitaxially grown Fe films with thickness of 22 monolayer (ML) and 44 ML on Cu(100) single crystal at room temperature. Metastable Fe films of 22 ML thickness were prepared in CO pressure and 44 ML Fe films were prepared by co-evaporation of Fe with Fe64Ni36 (invar). Structural changes are analyzed by scanning tunneling microscopy and low-energy electron diffraction. The aim of this thesis is to discuss the influence of the sputtering parameters such as ion dose and ion energy on the nucleation of bcc nanocrystals, their growth, final shape and size. The influence of different Ni concentration on stability of 44 ML thick Fe films is also discussed.
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Upgrade of the UHV manipulator for SIMS and LEIS methods
Dao, Tomáš ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This bachelor’s thesis deals with the design and the construction of the manipulator, which operates under ultra high vacuum. In the first section, the original design and realization of the manipulator with six motion axis is introduced. Second section deals with the modifications of the manipulator. Advantages and disadvantages of the design are discussed and a new design of the manipulator, based on the experience from manipulator operation, is projected. Section is mainly focused on the design of the sample rotation using a stepper motor working in the ultra high vacuum. The new Faraday cup was also designed and tested. The last section contains the LEIS structural analysis measurement using the manipulator.
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Tomographical analysis of semiconductor devices by FIB-SIMS
Mičulka, Martin ; Voborný, Stanislav (referee) ; Bábor, Petr (advisor)
This thesis deals with a tomographic analysis of the structure of through-silicon via utilizing TOF-SIMS; a method used in electrotechnical industry. A focused ion beam isused to create a cross section of a semiconductor to reveal its inner structure. Afterwards a newly created surface is analysed by TOF-SIMS to determine its chemical composition. A series of 2D images is created which are used for tomographic reconstruction of the through-silicon via. Moreover, the thesis deals with an optimization of FIB-SIMS method by employing oxygen ion beam for improvement of ionized sputter yield and for artifacts reduction. A measurement of instability of bismuth ion beam is demonstrated as well.
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Correlative tomography
Vařeka, Karel ; Touš,, Jan (referee) ; Bábor, Petr (advisor)
Předložená diplomová práce se zabývá korelativním přístupem multimodální analýzy struktur prokovování s různým rozlišením. Výzkum je součástí mezinárodního projektu týkajícího se charakterizace poruch zmíněných struktur, které jsou implementovány v polovodičových zařízeních. Kombinace korelativní mikroskopie a tomografie technikami NanoXCT, FIB-SEM (EDS), FIB-SIMS a AFM byla navržena k zavedení opakovatelného pracovního postupu. Tomografie fokusovaným iontovým svazkem je metoda přesného odprašování v řezech, která mimo jiné v každém průřezu získává cenné snímky s vysokým rozlišením (FIB-SEM) nebo mapy chemického složení (FIB-SIMS). Následující transformace obrazu umožňuje identifikaci defektů jako funkci hloubky ve struktuře. Práce dále věnuje pozornost metodám sjednocení obrazů za účelem optimální prezentace získaných dat.
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Analysis of advanced materials and structures by SIMS method
Holeňák, Radek ; Kalousek, Radek (referee) ; Bábor, Petr (advisor)
Bachelor theasis deals with the study of advanced materials by SIMS method and the possibilities of kvantitative analysis using maesured data. Chemical analysis of the ceramic surface in order to optimize the measurement conditions was performed. The rest of the work uses the data output from the measurement to describe the internal microstructure of the material. Using sophisticated methods, Si precipitates in the AlSi layer are localized and described, and the formation of the MgAl2O4 phase in ceramic samples is confirmed. Achieving all the set goals reveals the potential of the SIMS method and, above all, the possibility of processing the data output from the measurements.
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2D and 3D analysis of semiconductor devices by SIMS
Vařeka, Karel ; Šamořil, Tomáš (referee) ; Bábor, Petr (advisor)
The chemical analysis of semiconductor structures using the SIMS method is the main part of this bachelor thesis. It allows the user to make a depth profiling and a creation of 2D or 3D material images. During the analysis of the chip from the TIGBT semiconductor, there is a sputtering of a heterogeneous structure in the material with different sputtering rates. It is convenient to make a cut through the material using a focused ion beam to create a profile, which grants the user to perform a tomographic measurement. This new surface enables a chemical analysis of a depth profile of semiconductor structures without the need for sputtering beam in dynamic SIMS mode. By reconstructing individual two-dimensional images, it is possible to assemble a three-dimensional pattern of the analysed sample area. Also, the preparation and removal of the lamella from the TIGBT chip were accomplished and analysed via a detector of transmission electrons.
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