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Imaging of SiCN thin films on silicon substrate in the scanning low energy electron microscope
Zobačová, Jitka ; Hüger, E. ; Urbánek, Michal ; Polčák, J. ; Frank, Luděk
The Si-C-N materials have been attracting growing interest due to their excellent physical properties. They are hard, possess a large band gap, resist harsh and high temperature environments, and exhibit interesting nanostrucrures such as turbosrtatic-carbon and nanopores. Their range of application includes anti-erosive turbines and cutting tools, opto-electronic materials, sensors and special drug delivery pharamaceutical products. Most of their interesting properties stems from carbon-nitrogen bonds. Hence, Si-C-N materials with a high content of carbon and nitrogen are of interest. Up to date, the highest carbon and nitrogen content could be synthesised in SiC2N4 and Si2CN4. Both chemical compositions are stable and possess the highest achieved carbon-nitrogen bond. Two different nitride bonding configuration was measured to be present.
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Elektrostatický nízkoenergiový rastrovací elektronový mikroskop pro Augerovu analýzu
Romanovský, V. ; El Gomati, M. M. ; Frank, Luděk ; Müllerová, Ilona
A scanning low energy electron microscope (SLEEM) was realized with a cathode lens in which the negatively biased specimen is used as the cathode. In this arrangement, electrons pass through the microscope at high energy and are decelerated to low energy before landing on the sample. This design brings plenty of signal even in the landing energy range of tens or units of eV. However, the use of the primary electrons with low energy brings some problems e.g. low source brightness, increased aberrations and sensitivity to stray fields. The scanning Auger microscopy (SAM) is well-established experimental method. A combination of SAM and SLEEM in one device would therefore provide a sufficient tool to solve the problems inherent in these individual methods. Although much has already been achieved in the area of detection of slow electrons, none of the methods currently known is suitable to be built into a scanning illumination column for Auger microprobe analysis
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