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Real-Time Displaying Quality Maps of Silicon Wafers
Mareček, Matěj ; Přibyl, Bronislav (referee) ; Herout, Adam (advisor)
The goal of this bachelor's thesis is to design and implement a software system that can collect real-time data from measurements of silicon wafers. There could be tens or hundreds data sources of measurements and data from these measurements can be rendered (also in real time). This work contains a description of the process of manufacturing and testing of integrated circuits. Subsequently, there is description of system architecture design, interior architecture of real-time server and GUI of client application. In the last section, there is shown how rendering of silicon wafers was implemented on platform JavaFX 2.2 and also implementation of hybrid multi-threading server architecture.
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Thermal Desorption Spectroscopy (TDS) and its Application for Research of Surface Processes
Potoček, Michal ; Čech, Vladimír (referee) ; Pavlík, Jaroslav (referee) ; Dub, Petr (advisor)
ermal desorption spectroscopy (TDS) is a common method for surface analysis of adsorbed molecules. In chapter 1 the work deals with the theoretical background of this method and shows the principles of a desorption process influenced by subsurface diffusion. Chapter 2 first shows application of TDS for detection of surface molecules and determination of binding energy.Experiments were mainly focused on ditermination of surface adsorbents and impurities on Si wafers. The second part of chapter 2 describes desorption of atoms of a Ga layer on Si surface and their subsurface diffusion. A Ga diffusion process was also observed by with secondary ion mass spectrometry (SIMS) and numerically simulated.
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System for visualization of semiconductor manufacturing data
Turoň, Rudolf ; Holek, Radovan (referee) ; Petyovský, Petr (advisor)
This master thesis focuses on the design and implementation of a web application for visualization and annotation of semiconductor manufacturing data. The aim of the thesis is to conduct a survey of available data visualization methods and technologies used for web applications, define the requirements for such a visualization system, theoretical design and implementation of this solution. It also includes testing, incorporation of feedback obtained from application users and demonstration of application use on production data. The final application is implemented using a client-server architecture through a REST API for communication. The frontend part of the application allows searching, visualization and editing of the wafer map defects. WebGL technology and PixiJS library were used to render graphics for interactive visualization of the wafer maps on the web. The backend part is implemented using Java 17 in conjunction with Spring Boot technology and provides data processing and communication with other systems. The thesis concludes with a discussion of the results obtained and a summary of the possibilities for further improvements of the application.
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Real-Time Displaying Quality Maps of Silicon Wafers
Mareček, Matěj ; Přibyl, Bronislav (referee) ; Herout, Adam (advisor)
The goal of this bachelor's thesis is to design and implement a software system that can collect real-time data from measurements of silicon wafers. There could be tens or hundreds data sources of measurements and data from these measurements can be rendered (also in real time). This work contains a description of the process of manufacturing and testing of integrated circuits. Subsequently, there is description of system architecture design, interior architecture of real-time server and GUI of client application. In the last section, there is shown how rendering of silicon wafers was implemented on platform JavaFX 2.2 and also implementation of hybrid multi-threading server architecture.
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Thermal Desorption Spectroscopy (TDS) and its Application for Research of Surface Processes
Potoček, Michal ; Čech, Vladimír (referee) ; Pavlík, Jaroslav (referee) ; Dub, Petr (advisor)
ermal desorption spectroscopy (TDS) is a common method for surface analysis of adsorbed molecules. In chapter 1 the work deals with the theoretical background of this method and shows the principles of a desorption process influenced by subsurface diffusion. Chapter 2 first shows application of TDS for detection of surface molecules and determination of binding energy.Experiments were mainly focused on ditermination of surface adsorbents and impurities on Si wafers. The second part of chapter 2 describes desorption of atoms of a Ga layer on Si surface and their subsurface diffusion. A Ga diffusion process was also observed by with secondary ion mass spectrometry (SIMS) and numerically simulated.
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