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National Repository of Grey Literature 3 records found  Search took 0.00 seconds. 
Thermal Desorption Spectroscopy (TDS) and its Application for Research of Surface Processes
 Potoček, Michal ; Čech, Vladimír (referee) ; Pavlík, Jaroslav (referee) ; Dub, Petr (advisor)
ermal desorption spectroscopy (TDS) is a common method for surface analysis of adsorbed molecules. In chapter 1 the work deals with the theoretical background of this method and shows the principles of a desorption process influenced by subsurface diffusion. Chapter 2 first shows application of TDS for detection of surface molecules and determination of binding energy.Experiments were mainly focused on ditermination of surface adsorbents and impurities on Si wafers. The second part of chapter 2 describes desorption of atoms of a Ga layer on Si surface and their subsurface diffusion. A Ga diffusion process was also observed by with secondary ion mass spectrometry (SIMS) and numerically simulated.
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Thermal Desorption Spectroscopy (TDS) and its Application for Research of Surface Processes
 Potoček, Michal ; Čech, Vladimír (referee) ; Pavlík, Jaroslav (referee) ; Dub, Petr (advisor)
ermal desorption spectroscopy (TDS) is a common method for surface analysis of adsorbed molecules. In chapter 1 the work deals with the theoretical background of this method and shows the principles of a desorption process influenced by subsurface diffusion. Chapter 2 first shows application of TDS for detection of surface molecules and determination of binding energy.Experiments were mainly focused on ditermination of surface adsorbents and impurities on Si wafers. The second part of chapter 2 describes desorption of atoms of a Ga layer on Si surface and their subsurface diffusion. A Ga diffusion process was also observed by with secondary ion mass spectrometry (SIMS) and numerically simulated.
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Oxygen Precipitation in CZ Si Wafers after High Temperature
 Meduňa, M. ; Caha, O. ; Kuběna, J. ; Kuběna, A. ; Svoboda, Milan ; Buršík, Jiří
In this work we study two stage and three stage annealing processes with application of Tabula rasa. The evolution of precipitates at various phases during annealing process for various temperatures was obtained from series of experimental techniques.
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