National Repository of Grey Literature 3 records found  Search took 0.01 seconds. 
Oxygen Precipitation in CZ Si Wafers after High Temperature
Meduňa, M. ; Caha, O. ; Kuběna, J. ; Kuběna, A. ; Svoboda, Milan ; Buršík, Jiří
In this work we study two stage and three stage annealing processes with application of Tabula rasa. The evolution of precipitates at various phases during annealing process for various temperatures was obtained from series of experimental techniques.

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