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Experimental study of the use of probe methods for diagnostic of low-temperature magnetized plasma
Zanáška, Michal ; Tichý, Milan (advisor) ; Adámek, Jiří (referee)
The ball-pen probe is a relatively new diagnostic method, that has been designed for direct measurement of plasma potential in magnetized plasmas. Nowadays, it is routinely used at several high-temperature plasma devices in Europe and it has been tested also in conditions of low-temperature plasma, which are substantially different from that of high-temperature plasma. The measurements performed so far showed, that ball-pen probe could be used also in low-temperature plasma. However, more measurements were needed to prove the applicability of ball-pen probe. Therefore, the main aim of this work is to compare the method of ball-pen probe with simultaneous measurements using Langmuir and emissive probe. Measurements were performed in DC discharge of cylindrical magnetron at various discharge conditions and radial positions of probes. Powered by TCPDF (www.tcpdf.org)
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Study of reactions of simple ions in low temperature plasma
Kálosi, Ábel ; Plašil, Radek (advisor) ; Picková, Irena (referee)
The subject of this thesis is the study of the probe diagnostic method of low temperature plasma. The basis of Langmuir probe diagnostics in terms of appli- cation on apparatus CryoFALP II for the study of reactions of simply particles, the principle of the FALP technique and the experimental method of undertaken measurements are described. As a part of the thesis a package of evaluation pro- grams were compiled, which are ready to be a part of the measuring system as described in the thesis. Main results concern verification of the proper application of Langmuir probe technique in conditions characteristic for the apparatus, argon plasma was chosen as the medium of the measurements, where the characteristic loss process is ambipolar diffusion of charged particles. The application of the acquired knowledge is shown on recombination in oxygen plasma.
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Measurement of the plasma potential by means of the ball-pen and Langmuir probe
Zanáška, Michal ; Tichý, Milan (advisor) ; Hrachová, Věra (referee)
The ball-pen probe represents a new unique probe recently developed at the Institute of Plasma Physics in Prague for direct measurement of plasma potential at the CASTOR tokamak. Presently is the probe utilized also on several other high-temperature devices in Europe. In recent years one has aimed to use ball- pen probe also in conditions for which it was not originally intended. The aim of this bachelor thesis is to experimentally demonstrate that the ball-pen probe is suitable for the direct measurement of the plasma potential in low-temperature weakly magnetized plasma generated by a DC cylindrical magnetron by perfor- ming comparative measurements using a Langmuir probe. 1
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Pulsed plasma systems
Klusoň, Jan ; Kudrna, Pavel (advisor) ; Krčma, František (referee) ; Čada, Martin (referee)
The doctoral thesis deals with the experimental study of the low-temperature plasma designated for the preparation of thin films using the method of physical sputtering. It describes measurements which were realized on two types of devices - on the low-pressure plasma jet sputtering system and on the planar magnetron. The plasma diagnostics in the discharge excited in the pulse regime represent the main theme of the thesis. The discharge in the low-pressure plasma jet was studied by means of an electrostatic Langmuir probe, in the case of the planar magnetron, mass spectroscopy with energetic as well as time resolution was used. To understand the results achieved in the pulse generated plasma good knowledge of the basic continuous DC regime of the discharge excitation is essential. Therefore a considerable part of the thesis deals purely with the continuous DC discharge. In the case of the low- pressure plasma jet, the attention was focused also on the characteristic property of this plasma source, which is the flow from the jet.
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Studium parametrů plazmatu v plazmatické trysce
Štefániková, Estera ; Tichý, Milan (advisor) ; Klusoň, Jan (referee)
This thesis deals with the low-temperature plasma diagnostics by means of electrostatic Langmuir probe. The measurements were carried out on the experimental system of plasma jet which is very perspective mainly for the deposition of thin layers. Besides different resistant and industrial compelling surfaces there are also some layers with specific electrical or optical properties that cannot be prepared in other way. In order to control and reproduce such material depositions, the knowledge of plasma parameters is inevitable. The main contribution of this work lies in the measurement of vertical profiles of main plasma parameters (electron temperature, density and mean energy; the floating and plasma potential) in different pressure conditions.
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Construction and Realisation of the High Voltage Power for Probe Cleaning
TŮMA, Zbyněk
This work is focused on the construction and realization of voltage source for cleaning of Langmuir probe. The work shortly acquaint with the questions of probe plasma diagnostics and the potential problems of her application in plasma, where comes to pollution of diagnostic Langmuir probe. The main part of this work is the analysis of the technical solution of cleaning Langmuir probe. The output of this work is the concrete technical solution and realization of voltage source for cleaning Langmuir probe.
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