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Detective quantum efficiency of electron bombarded CCD
Horáček, Miroslav
Detective quantum efficiency (DQE) describes the ability of the image sensor to transfer input image information into the output electrical signal from the point of view of added noise. DQE was measured in direct electron bombarded mode using an empty image and the mixing facor method for energies of electrons 2 to 5 keV. DQE increases with increasing energy of bombarded electrons. Optimum wotking energy from the point of view of dynamic range, brightness resolutin, and integration time of the sensor is 4.2 keV. DQE is 0.7 for this energy and integration time below 10 ms.
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Design of low energy SEM
Vlček, Ivan
Paper briefly describes main features of proposed low-energy electron scanning microscope.
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Theoretical and experimental study of a Wien filter properties for using at the very-low-energy scanning electron microscope
Vlček, Ivan
Results of Wien filter study are employed for design of a very low-energy scanning microscope. A Wien filter serves as a separator of primary and signal electrons in this arrangement. The paper describes design of other optical parts of the microscope: objective lens, deflection system and CCD detector optics.
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Theoretical and Experimental Study of Wien Filter Properties for Use in the Scanning Very Low Energy Electron Microscope
Vlček, Ivan
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Návrh nízkoenergiového REM
Vlček, Ivan
;
Lencová, Bohumila
;
Horáček, Miroslav
Our aim is to redesign the low-energy SEM (a scanning LEEM) in an UHV apparatus designed in our institute to allow the detection of the angular distribution of signal electrons. For this purpose we have to separate the signal electrons from the primary beam with a Wien filter and project the image of the back-focal plane of the objective lens on an area-sensitive detector (a back-illuminated CCD). Therefore we have to design a new electrostatic optics working in UHV
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