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Detekce signálu v rastrovacím elektronovém mikroskopu pomocí detektorů sekundárních elektronů
Konvalina, Ivo ; Hovorka, Miloš ; Dvořáková, Marie ; Müllerová, Ilona
The collection of secondary electrons (SE) was studied for microscopes where the magnetic field penetrates to the specimen surface and for the arrangement with the specimen region free of magnetic field. Collection efficiency of secondary electron detectors varies with their energy and angular sensitivity connected with electrostatic and magnetic field distribution in the specimen region which influences the contrast of SE images. The trajectories of SE with regard to their energy, angular distributions are simulated and secondary electron detectors compared on the basis of calculated collection efficiency. For the verification of the simulated data the standard resolution-testing specimen with Au particles on a carbon substrate was used.
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