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Special technical solutions in vacuum technology
SZABÓ, Robin
This thesis is focussed on the realisation of various technical solutions for microwave plasma apparatus. The theoretical part focuses on vacuum and general terms that are related. Attention was paid for example to definition of pressure, to pressure and central free track, units of measurement of pressure and their conversions. This part includes the classification of vacuum according to pressure. The next section of the dissertation is concerned with achieving vacuum including a description of rotary oil and turbo molecular pump. Part of the thesis includesa description of plasma microwave apparatus CX22 which was used during realisation of this dissertation. There is also a description of vacuum chamber, gas pump system, system of gas lead, microwave source, evaporator of liquid precursor and mixing apparatus. In the practical section a measurement of physical and technological quantity included. This part covers the inflow of apparatus measurement and temperatures of substrate during plasma process. In the next part there is a description of specific technical solutions suggested by the dissertation author. Amongst suggested technical solutions in this paper there is vacuum isolator, heating system of evaporator pipe, box of an evaporator of liquid precursor, ''gas ring'' and tablet equipment. Vacuum isolator was designed by 3D simulation and serves as a connection to detection technology. Heating of pipes of an evaporator were constructed to improve quality of the plasma process. The box of an evaporator was suggested for maintaining fresh air in a lab. A Gas ring was also designed by 3D simulation and serves as a specially adjusted pipe for bringing vapour of precursor near the substrate. The tablet equipment was constructed for unified preparation of compressed powder cellulosic tablets. Also from the available vacuum pumps, multilevel pumping was constructed that helped achievement of reduced lowest pressure.
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Mechanical and Electrical Properties of Thin Metal Films Deposited by Vacuum Evaporation
W. F. Yahya, Doaa ; Kolařík, Vladimír (referee) ; Štencl,, Jiří (referee) ; Šandera, Josef (advisor)
Thin layers are widely used in many fields of technology and today we can say that they are found in all modern technologies. Thin layers can be created in two ways, namely by chemical or physical means. This work focuses on the latter method, more particularly a technology of thermal evaporation of thin layers in a vacuum. The work focuses on the process principles during and after the evaporation. Much of the work focuses on the development and design of experiments. These experiments illustrate some of the phenomena that take place on thin films produced by the aforementioned technology. Work helps to better understand processes during formation of thin layers and properties that influence the quality and stability of thin films. In conclusion we describe results of experiments and new developments in the field of thin films deposition using evaporation under vakuum are summarized.
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Energy Performance of sewerage networks
Žďára, Jan ; Hluštík, Petr (referee) ; Raclavský, Jaroslav (advisor)
First section of this master thesis is background research of energy demand of sewer systems. Intrudoctory chapter explains basic concepts. Second chapter is dealing with Czech and European legislation concerning energy consumption of water service. Third chapter describes energy demand of sewer systems. In this chapter there are described conventional gravity, vakuum and pressure sewer systems and components with major power consumption. Fourth chapter describes actual state of energy demand of WWTP and possible ways of improving power consumption of WWTP. Second section is a review of energy consumtion of vacuum systems of five different municipalities including one WWTP. Measured and evaluated outputs were used to create energy audit methodology for sewer systems.
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Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
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Steam ejector pump
Třináctý, Jan ; Baláš, Marek (referee) ; Šnajdárek, Ladislav (advisor)
The aim of this theses is to do search about maintaining vaccum in surface condensors and subsequently propose basic dimension of one stage steam ejector. The first part deals with the issue of vacuum. The following part is dedicated to description of various types of vacuum pumps. Hence it describes the principle of operation of each pump as well as their output. The following part deals with vacuum and vacuum technology in the field of power engineering. This part is dedicated to those types of vacuum pumps that are used in power engineering, especially to steam ejectors which are most widely used. The final part is addressed to the design of single stage steam ejector. This part contains the calculation of pump dimension. The conclusion evaluates the design of one stage steam ejector.
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