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Deposition and analysis of DLC thin films
Rudolf, Miroslav ; Čech, Vladimír (oponent) ; Šikola, Tomáš (vedoucí práce)
Diploma thesis outlines the problems during preparation and analysis of DLC:H thin films. Many scientists have been interested in these films already for several decades. In the present time, many techniques exist for their preparation and analysis. The preparation of DLC has a significant influence on their characteristics and applications. There are many criteria how to examine the films. In this thesis, the DLC:H layers prepared on the crystalline silicon by the RF-PECVD method are discussed. Subsequently, the mechanical, tribological and optical properties have been investigated. The techniques as XPS, Raman spectroscopy, reflectometry, hardness and adhesion measurements have been employed. A part of the thesis deals with the modelling of DLC and DLC:H films from the first principles. The first-principle simulation software Abinit is used for this purpose. Abinit has been distributed under the GPL. The way of selection of input parameters has been studied with respect to the convergence of the results. Attention has been paid to computing the vibrational spectra in the middle of the Brillouin zone and the overall density of electronic states of DLC cluster in a cubic supercell. These data can be compared with results experimentally obtained from Raman spectroscopy and XPS of the valence band, respectively.
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Deposition and analysis of DLC thin films
Rudolf, Miroslav ; Čech, Vladimír (oponent) ; Šikola, Tomáš (vedoucí práce)
Diploma thesis outlines the problems during preparation and analysis of DLC:H thin films. Many scientists have been interested in these films already for several decades. In the present time, many techniques exist for their preparation and analysis. The preparation of DLC has a significant influence on their characteristics and applications. There are many criteria how to examine the films. In this thesis, the DLC:H layers prepared on the crystalline silicon by the RF-PECVD method are discussed. Subsequently, the mechanical, tribological and optical properties have been investigated. The techniques as XPS, Raman spectroscopy, reflectometry, hardness and adhesion measurements have been employed. A part of the thesis deals with the modelling of DLC and DLC:H films from the first principles. The first-principle simulation software Abinit is used for this purpose. Abinit has been distributed under the GPL. The way of selection of input parameters has been studied with respect to the convergence of the results. Attention has been paid to computing the vibrational spectra in the middle of the Brillouin zone and the overall density of electronic states of DLC cluster in a cubic supercell. These data can be compared with results experimentally obtained from Raman spectroscopy and XPS of the valence band, respectively.
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