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3D Construction View of Differential Pumping Chamber with Detector Board of Environmental Scanning Electron Microscope
Neděla, Vilém
This paper deals with construction of the differential pumping chamber with a detector board for adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially on the 3D construction view of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts into the environmental scanning electron microscope.
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