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Characterization of a new deposition system for coating the fibers
Zvonek, Milan ; Salyk, Ota (referee) ; Čech, Vladimír (advisor)
Cieľom bakalárskej práce je charakterizácia depozičného systému na výrobu tenkých vrstiev. Teoretická časť je zameraná na literárnu rešerš o plazme, plazmovej polymerácií, tenkých vrstvách a ich analýzu pomocou infračervenej spektroskopie a spektroskopickej elipsometrie. Experimentálna časť popisuje použité materiály a aparaturu použitú na prípravu tenkých vrstiev pomocou plazmovej polymerácie. Posledná časť popisuje výsledky merania depozícií tenkých vrstiev a ich vyhodnotenie vzhľadom na depozičné podmienky.
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Chemical structure of silicon-based thin films
Olivová, Lucie ; Franta, Daniel (referee) ; Čech, Vladimír (advisor)
This bachelor thesis deals with the characterization and preparation of thin polymer films deposited on silicon wafers by plasma-enhanced chemical vapour deposition. The main part of the work is background research in the field of plasma polymerization and infrared spectroscopy. Thin polymer films based on tetravinylsilane and tetravinylsilane with the addition of mixed gas (argon) were prepared in the experimental part. The prepared thin films of plasma polymers were characterized by the selected spectroscopic technique - infrared spectroscopy. Based on the evaluation of transmission infrared spectra, the chemical structure of the deposited polymer films was determined. The determined chemical structures of the prepared films were observed with respect to the deposition conditions and hence the possibility to prepare tailored films for a variety of applications.
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Chemical structure of silicon-based thin films
Olivová, Lucie ; Franta, Daniel (referee) ; Čech, Vladimír (advisor)
This bachelor thesis deals with the characterization and preparation of thin polymer films deposited on silicon wafers by plasma-enhanced chemical vapour deposition. The main part of the work is background research in the field of plasma polymerization and infrared spectroscopy. Thin polymer films based on tetravinylsilane and tetravinylsilane with the addition of mixed gas (argon) were prepared in the experimental part. The prepared thin films of plasma polymers were characterized by the selected spectroscopic technique - infrared spectroscopy. Based on the evaluation of transmission infrared spectra, the chemical structure of the deposited polymer films was determined. The determined chemical structures of the prepared films were observed with respect to the deposition conditions and hence the possibility to prepare tailored films for a variety of applications.
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Characterization of a new deposition system for coating the fibers
Zvonek, Milan ; Salyk, Ota (referee) ; Čech, Vladimír (advisor)
Cieľom bakalárskej práce je charakterizácia depozičného systému na výrobu tenkých vrstiev. Teoretická časť je zameraná na literárnu rešerš o plazme, plazmovej polymerácií, tenkých vrstvách a ich analýzu pomocou infračervenej spektroskopie a spektroskopickej elipsometrie. Experimentálna časť popisuje použité materiály a aparaturu použitú na prípravu tenkých vrstiev pomocou plazmovej polymerácie. Posledná časť popisuje výsledky merania depozícií tenkých vrstiev a ich vyhodnotenie vzhľadom na depozičné podmienky.
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