Original title: Study of layers of metal nanoparticles on semiconductor wafers for hydrogen detection
Authors: Muller, M. ; Žďánský, Karel ; Zavadil, Jiří ; Piksová, K.
Document type: Papers
Conference/Event: NANOCON 2011, 3 rd International Conference, Brno (CZ), 2011-09-21 / 2011-09-23
Year: 2011
Language: eng
Abstract: Colloid solutions of metal Pt, Pd and Pt/Pd alloy nanoparticles by reverse micelle technique in isooctane were prepared. Layers of the nanoparticles on InP and GaN substrates using electrophoretic deposition were prepared. Metal nanoparticles in the colloid and in deposits were characterized by SEM. Schottky diodes were fabricated by application of colloidal graphite on nanoparticle layer. An increase in current in hydrogen-nitrogen mixture was measured for hydrogen concentrations between 5 and 1000 ppm.
Keywords: nanostructures; semiconductor devices; sensors
Project no.: CEZ:AV0Z20670512 (CEP)
Host item entry: NANOCON 2011, Conference Proceedings, 3 rd International Conference, ISBN 978-80-87294-27-7

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0216250

Permalink: http://www.nusl.cz/ntk/nusl-96327


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers