Original title:
Analysis of Whirling of Gas Flow within the Specimen Chamber of ESEM
Authors:
Bayer, Robert Document type: Papers
Language:
eng Publisher:
Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií Abstract:
The usage of an Environmental scanning electron microscope (ESEM) brings the possibility of studying many kinds of materials and chemical reactions never studied before. In this article there are compared and analyzed several simulation results of gas flow in the specimen chamber of ESEM with high gas pressure throughout the whole volume except on its optical axis, where low gas pressure is needed.
Keywords:
ANSYS Fluent; Electron microscopy; Environmental scanning electron microscope; ESEM; Gas whirling; SolidWorks; Specimen chamber; Von Karman vortex Host item entry: Proceedings of the 22nd Conference STUDENT EEICT 2016, ISBN 978-80-214-5350-0
Institution: Brno University of Technology
(web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library. Original record: http://hdl.handle.net/11012/84002