Original title: Diagnostika depozice tenkých vrstev připravovaných z dimethylphenylsilanu
Translated title: Diagnostics of thin layer deposition using dimethylphenylsilane monomer
Authors: Procházka, Michal ; Kudrle, Vít (referee) ; Krčma, František (advisor)
Document type: Master’s theses
Year: 2010
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta chemická
Abstract: [cze] [eng]

Keywords: optical emission spectroscopy; organosilanes; plasma diagnostics; thin film deposition; depozice tenkých vrstev; diagnostika plazmatu; optická emisní spektrometrie; organokřemičitany

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/13471

Permalink: http://www.nusl.cz/ntk/nusl-575355


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2024-04-02, last modified 2024-04-03


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