Original title: Napájecí zdroj pro pulsní magnetronové naprašování
Translated title: Power source supply for pulse magnetron sputtering
Authors: Chochola, Ondřej ; Havlíček, Tomáš (referee) ; Boušek, Jaroslav (advisor)
Document type: Bachelor's theses
Year: 2008
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Abstract: [cze] [eng]

Keywords: Deposition; discharge; magnetron; power supply; pulse; sputtering; substitute circuit; Depozice; magnetron; naprašování; náhradní obvod; pulsní; pájecí zdroj; výboj

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/15217

Permalink: http://www.nusl.cz/ntk/nusl-550494


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Bachelor's theses
 Record created 2024-04-02, last modified 2024-04-03


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