Original title: Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters
Authors: Burda, Daniel ; Knápek, Alexandr
Document type: Papers
Language: eng
Publisher: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract: This research aims to obtain a more in-depth understanding of the field emission properties of tungsten single-tip field emitters (STFEs) coated with a several tens of nanometer thin barrier of Al2O3. The introduction of an additional barrier into the metal-vacuum interface system of the emitter can be beneficial to improve its performance. The tungsten emitters were prepared using a two-step electrochemical drop-off etching technique. Thin oxide barrier coatings were prepared by using low-temperature atomic layer deposition (ALD), a chemical vapor deposition technique. Field emission was studied in an internally developed field emission microscope (FEM) working in UHV vacuum (< 1·10−7 Pa), and the experimental field emission data were analyzed by the so-called Murphy-Good plotsThe value of the local work function of the grown oxide layer were investigated using Ultra-violet photoelectron spectroscopy (UPS).
Keywords: Cold field emission, single-tip field emitters, tungsten tip, aluminum oxide, dielectric coatings, Murphy-Good plot
Host item entry: Proceedings II of the 28st Conference STUDENT EEICT 2022: Selected papers, ISBN 978-80-214-6030-0

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/208647

Permalink: http://www.nusl.cz/ntk/nusl-511916


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