Original title: Double-Beam Mach-Zehnder Interferometer Forthin Piezoelectric Films Measurement
Authors: Skalský, Michal
Document type: Papers
Language: eng
Publisher: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract: This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.
Keywords: double-beam; Laser interferometry; Mach-Zehnder interferometer; thin piezoelectric films
Host item entry: Proceedings of the 23st Conference STUDENT EEICT 2017, ISBN 978-80-214-5496-5

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/187142

Permalink: http://www.nusl.cz/ntk/nusl-414802


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