Original title: Simulation And Fabrication Of Piezoelectric Mems Resonators
Authors: Klempa, Jaroslav
Document type: Papers
Language: eng
Publisher: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract: This paper presents FEM analyses and fabrication of piezoelectric MEMS resonators. Modal and harmonic analyses were made using Ansys® Workbench. These simulations showed the influence of resonators geometry on their out-of-plane displacement and corresponding resonant frequencies. Piezoelectric resonators were fabricated by standard microfabrication processing compatible with complementary metal-oxide-semiconductor (CMOS) technology.
Keywords: FEM analyses; MEMS; Piezoelectric resonator; thin films
Host item entry: Proceedings of the 23st Conference STUDENT EEICT 2017, ISBN 978-80-214-5496-5

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/187050

Permalink: http://www.nusl.cz/ntk/nusl-414710


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Conference materials > Papers