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Original title:
Hybridní reaktivní HiPIMS depoziční systém s pro depozicioptických funkčních vrstev na bázi oxidů kovů
Translated title: Hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films
Authors: Hubička, Zdeněk ; Čada, Martin ; Olejníček, Jiří ; Kšírová, Petra ; Tvarog, Drahoslav
Document type: Research reports
Year: 2018
Language: cze
Abstract: [cze] [eng]
Keywords: discharge; HiPIMS; plasma; thin film
Project no.: FV20580
Funding provider: GA MPO
Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0293030
Permalink: http://www.nusl.cz/ntk/nusl-391585
The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Reports > Research reports
Translated title: Hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films
Authors: Hubička, Zdeněk ; Čada, Martin ; Olejníček, Jiří ; Kšírová, Petra ; Tvarog, Drahoslav
Document type: Research reports
Year: 2018
Language: cze
Abstract: [cze] [eng]
Keywords: discharge; HiPIMS; plasma; thin film
Project no.: FV20580
Funding provider: GA MPO
Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0293030
Permalink: http://www.nusl.cz/ntk/nusl-391585
The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Reports > Research reports
Record created 2019-02-13, last modified 2021-11-24