Original title: Vývoj procesu mytí a příprava povrchu před depozicí
Translated title: Development of the cleaning process and predeposition treatment of an optical surface
Authors: Budasz, Jiří
Document type: Research reports
Year: 2018
Language: cze
Abstract: [cze] [eng]
Zpráva popisuje vývoj mycího postupu substrátů pro výrobu superodrazných zrcadel. Zahrnuje také vývoj procesu ošetření povrchu ve vakuu. The report deals with a development of cleaning precedure of substrates used for producing high reflective mirrors. It involves pre-deposition treatment of the surface in vacuum chamber.
Keywords: cleaning; High reflective coatings; pre-deposition treatment
Project no.: FV10071
Funding provider: GA MPO

Institution: Institute of Plasma Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0291698

Permalink: http://www.nusl.cz/ntk/nusl-391512


The record appears in these collections:
Research > Institutes ASCR > Institute of Plasma Physics
Reports > Research reports