Original title: Deposition of Organosilicon Polymer Thin Films by Plasma Enhanced Chemical Vapor Deposition
Translated title: Depozice organosilikonových tenkých vrstev pomocí PECVD
Authors: Zajíčková, L. ; Buršíková, V. ; Sťahel, P. ; Buršík, Jiří ; Peřina, Vratislav ; Macková, Anna ; Dubroka, A.
Document type: Proceedings
Conference/Event: International Conference of Solid State Chemistry /7./, Pardubice (CZ), 2006-09-24 / 2006-09-29
Year: 2006
Language: eng
Abstract: doplnit
Keywords: organosilicon polymers; PECVD; surface analyses
Project no.: CEZ:AV0Z10480505 (CEP), CEZ:AV0Z20410507 (CEP)

Institution: Nuclear Physics Institute AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0138433

Permalink: http://www.nusl.cz/ntk/nusl-36067


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Research > Institutes ASCR > Nuclear Physics Institute
Conference materials > Proceedings