Original title: RF Magnetron Sputtered Ag-Sb-S Amorphous Thin Films
Translated title: Amorfní tenké vrstvy Ag-Sb-S připravené radiofrekvenčním magnetronovým naprašováním
Authors: Gutwirth, J. ; Wágner, T. ; Drašar, Č. ; Beneš, L. ; Vlček, M. ; Hrdlička, M. ; Frumar, M. ; Schwarz, J. ; Tichá, H. ; Peřina, Vratislav
Document type: Proceedings
Conference/Event: Symposium on Plasma Physics an Technology /22./, Praha (CZ), 2006-06-26 / 2006-06-29
Year: 2006
Language: eng
Abstract: [eng] [cze]
Thin Ag-Sb-S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. There were prepared polycrystalline bulks of AgSbS2. Composition and homogeneity of these bulks were checked. Targets for RF magnetron sputtering were prepared from pulverized bulks by hot pressing technique. Targets were characterized the same way as bulks. Composition and homogeneity of prepared thin films were characterized by SEM-EDX and RBS/ERDA, amorphous/crystalline character was studied by XRD. Optical properties (spectral dependence of refractive index) were evaluated on basis of UV-Vis-NIR spectroscopy and variable angle spectral ellipsometry (VASE). Crystallization abilities were traced by thermal dependence of optical transmission of prepared thin films. RF magnetronovým naprašováním byly připraveny Ag-Sb-S tenké vrstvy jako potenciální materiál pro optický záznam dat.Složení a homogenita byla zkoumána metodami SEM-EDX, RBS, ERDA, XRD. Optické vlastnosti pomocí UV-vid. spektroskopie a elipsometrie pod proměnlivými úhly. Možnosti krystalizace byly sledovány z teplotní závislosti.
Keywords: chalcogenides; RF magnetron sputtering; surface analyses
Project no.: CEZ:AV0Z10480505 (CEP), GA203/06/1368 (CEP)
Funding provider: GA ČR

Institution: Nuclear Physics Institute AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0138419

Permalink: http://www.nusl.cz/ntk/nusl-36064


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