Original title: Study of Nitride Silicon Membrane for Pressure Sensors
Authors: Matějka, František ; Matějková, Jiřina ; Vrba, R.
Document type: Papers
Conference/Event: EDS 'Y2K /7./ - Electronic Devices and Systems Workshop, Brno (CZ), 2000-09-04 / 2000-09-13
Year: 2000
Language: eng
Abstract: This paper presents results of study of membrane distortion obtained by measuring membrane deflection in several cross sections by means of Talystep scanning profiler and by a new designed optical diffractive method. Mentioned methods were applied for analyses of diaphragms fabricated using LPCVD Si.sub.3./sub.N.sub.4./sub. layers with 150 nm thick layer deposited on silicon substrate with crystallographic orientation (100). As a result there are space models of distortion of the whole membrane surface caused by known pressure acting to the membrane. Those models are exploited to optimize design of pressure sensor and modeling and simutation of its properties.
Keywords: membrane deflection; membrane distortion; membrane surface
Project no.: CEZ:AV0Z2065902 (CEP), GA102/00/0938 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings - Electronic Devices and Systems Y2K - Intensive Training Programme in Electronic System Design - Workshop, ISBN 80-214-1780-3
Note: Související webová stránka: mailto:matejka@isibrno.cz

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101035

Permalink: http://www.nusl.cz/ntk/nusl-29515


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers