Název:
Study of Nitride Silicon Membrane for Pressure Sensors
Autoři:
Matějka, František ; Matějková, Jiřina ; Vrba, R. Typ dokumentu: Příspěvky z konference Konference/Akce: EDS 'Y2K /7./ - Electronic Devices and Systems Workshop, Brno (CZ), 2000-09-04 / 2000-09-13
Rok:
2000
Jazyk:
eng
Abstrakt: This paper presents results of study of membrane distortion obtained by measuring membrane deflection in several cross sections by means of Talystep scanning profiler and by a new designed optical diffractive method. Mentioned methods were applied for analyses of diaphragms fabricated using LPCVD Si.sub.3./sub.N.sub.4./sub. layers with 150 nm thick layer deposited on silicon substrate with crystallographic orientation (100). As a result there are space models of distortion of the whole membrane surface caused by known pressure acting to the membrane. Those models are exploited to optimize design of pressure sensor and modeling and simutation of its properties.
Klíčová slova:
membrane deflection; membrane distortion; membrane surface Číslo projektu: CEZ:AV0Z2065902 (CEP), GA102/00/0938 (CEP) Poskytovatel projektu: GA ČR Zdrojový dokument: Proceedings - Electronic Devices and Systems Y2K - Intensive Training Programme in Electronic System Design - Workshop, ISBN 80-214-1780-3 Poznámka: Související webová stránka: mailto:matejka@isibrno.cz
Instituce: Ústav přístrojové techniky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0101035