Original title:
Diagnostika plazmatu s vysokou ionizací při PVD depozici tenkých vrstev.
Translated title:
Diagnosties of highly ionized plasma during PVD thin film deposition.
Authors:
Jílek, Mojmír ; Tichý, Milan (advisor) ; Hrachová, Věra (referee) Document type: Master’s theses
Year:
2007
Language:
cze
Institution: Charles University Faculties (theses)
(web)
Document availability information: Available in the Charles University Digital Repository. Original record: http://hdl.handle.net/20.500.11956/9321