Original title:
RBS Characterization of rf Plasma Deposited Diamond-Like thin Films
Authors:
Peřina, Vratislav ; Janča, J. Document type: Papers Conference/Event: Symposium on Plasma Physics and Technology (16.), Praha (CZ), 1993-04-27 / 1993-04-29
Year:
1993
Language:
eng Host item entry: Proceedings of Symposium on Plasma Physics and Technology /16./
Institution: Nuclear Physics Institute AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0079836