Original title: Deposition of functional thin films by plasma processes
Authors: SEZEMSKÝ, Petr
Document type: Master’s theses
Year: 2016
Language: eng
Abstract: An aim of this work is a research of a deposition process of indium tin oxide by plasma assisted methods. The thesis deals with plasma diagnostics, e.g. Langmuir probe diagnostics and optical emission spectroscopy, as well as describes experiments of film deposition including their diagnostics, e.g. absorption spectroscopy, X-ray diffractometry and atomic force microscopy.
Keywords: electrically conductive transparent oxide; indium tin oxide; ITO; magnetron sputtering; optical fibre; plasma diagnostics; plasma discharge; surface diagnostics
Citation: SEZEMSKÝ, Petr. Deposition of functional thin films by plasma processes. České Budějovice, 2016. diplomová práce (Mgr.). JIHOČESKÁ UNIVERZITA V ČESKÝCH BUDĚJOVICÍCH. Přírodovědecká fakulta

Institution: University of South Bohemia in České Budějovice (web)
Document availability information: Fulltext is available in the Digital Repository of University of South Bohemia.
Original record: http://www.jcu.cz/vskp/41626

Permalink: http://www.nusl.cz/ntk/nusl-262725


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Universities and colleges > Public universities > University of South Bohemia in České Budějovice
Academic theses (ETDs) > Master’s theses