Original title: Surface acoustic waves in the layered systems
Authors: Tarasenko, Alexander ; Boháč, Petr ; Jastrabík, Lubomír
Document type: Papers
Conference/Event: European Conference on Acoustic Emission Testing /32./( EWGAE 2016 ), Praha (CZ), 20160907
Year: 2016
Language: eng
Abstract: The laser acoustic method was used for analysis of two layered systems: thin titanium and diamond like carbon films both deposited on silicon. The film and substrate parameters are determined by fitting the theoretical curve to the measured dispersion curve. The fit software seeks that set of the system parameters whose theoretical curve coincides the best with the experimental data. For the titanium film the best root-mean square deviation was 2.04 m/s with the relative error < O.I % and for the DLC system the corresponding value was 0.30 m/s (the relative error < O.O1 % ).
Keywords: diamond-like carbon films; laser acoustic method; layered systems; surface acoustic waves; Ti films
Project no.: LO1409 (CEP), TA03010743 (CEP)
Funding provider: GA MŠk, GA TA ČR
Host item entry: EWGAE 2016. Proceedings of the European Conference on Acoustic Emission Testing /32./, vol. 2, ISBN 978-80-214-5386-9

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0262960

Permalink: http://www.nusl.cz/ntk/nusl-261134


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers