Original title:
Pprava grafenovho biosensoru s odezvou ve stedn infraerven oblasti
Translated title:
Fabrication of graphene mid-infrared biosensor
Authors:
Gallina, Pavel ; Hrabovsk, Milo (referee) ; Sadlek, Jakub (advisor) Document type: Bachelor's theses
Year:
2016
Language:
cze Publisher:
Vysoké učení technické v Brně. Fakulta strojního inženýrství Abstract:
[cze][eng]
Hlavnm pedmtem tto bakalsk prce byla pprava a men odezvy grafenovch plazmonickch biosenzor vytvoench na rovnch a zakivench povrch. Pro ppravu senzor byl pouit grafen vyroben metodou chemick depozice z plynn fze (CVD). Struktury byly tvoeny pomoc elektronov (EBL) a optick litografie, reaktivnho iontovho leptn (RIE) a magnetronovho napraovn. Vsledn senzory byly pot pozorovny v elektronovm (SEM) a optickm mikroskopu, topografie byla zjiovna mikroskopem atomrnch sil (AFM) a men bylo provedeno infraervenou spektroskopi s Fourierovou transformac (FTIR).
The main subject of this bachelor's thesis was fabrication and measurement of response of graphene plasmonic biosensor prepared on flat and curved surfaces. Graphene produced by chemical vapour deposition (CVD) method was used for preparation of these sensors. The structures were fabricated using electron beam (EBL) and optical lithography, reactive ion etching (RIE) and magnetron sputtering. The resultant sensors were then observed in electron (SEM) and optical microscope, the topography was surveyed in atomic force microscope (AFM) and the measurement was carried out by Fourier transform infrared spectoscopy (FTIR).
Keywords:
AFM; biosensor; CVD; EBL; FTIR; graphene; magnetron sputtering; RIE; SEM; AFM; biosenzor; CVD; EBL; FTIR; grafen; magnetronov napraovn; RIE; SEM
Institution: Brno University of Technology
(web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library. Original record: http://hdl.handle.net/11012/60970