Original title: Height profile measurement by means of white-light interferometry
Authors: Pavlíček, Pavel
Document type: Papers
Conference/Event: National Conference with International Participation "Engineering Mechanics 2003", Svratka (CZ), 2003-05-12 / 2003-05-15
Year: 2003
Language: eng
Abstract: White-light interferometer measures the heigh profile of smooth as well of rough surfaces, this feature renders it suitable for the technical practice.
Keywords: rough surface -height profile; white-light interferometry
Project no.: CEZ:AV0Z1010921 (CEP), LN00A015 (CEP)
Funding provider: GA MŠk
Host item entry: Engineeting Mechanics 2003

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0032356

Permalink: http://www.nusl.cz/ntk/nusl-21895


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers