Original title: Characterization of microwave plasma generation in inhomogenous magnetic fields
Authors: Mišina, Martin ; Musil, Jindřich
Document type: Papers
Conference/Event: Symposium povlakovací metody CVD a PVD v průmyslu, Tišnov (CZ), 1993-04-13 / 1993-04-14
Year: 1993
Language: eng
Host item entry: Povlakovací metody CVD a PVD v průmyslu

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0028302

Permalink: http://www.nusl.cz/ntk/nusl-21755


The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers