Original title: Comparison of Dry and Wet Oxidation Process during Low Pressure Boron Diffusion with BBR3 in Solar Cell Production
Authors: Mojrová, B.
Document type: Papers
Language: eng
Publisher: Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract: This paper deals with replacing a dry oxidation with a wet oxidation process during low pressure diffusion using boron tribromide (BBr3) in solar cell production. Because the liquid boron trioxide (B2O3), a product of a chemical reaction during diffusion, condenses apart from wafers on walls of quartz tube, it is essential to clean the tube after diffusion. This could be done by evaporation of water into the tube after unload or, in order to make the production time shorter, by replacing the dry oxidation with wet oxidation process. In this paper a comparison of the wet and dry oxidation is given with regard to the solar cell production.
Keywords: BBr3; diffusion; oxidation; solar cell
Host item entry: Proceedings of the 21st Conference STUDENT EEICT 2015, ISBN 978-80-214-5148-3

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/43027

Permalink: http://www.nusl.cz/ntk/nusl-207218


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Conference materials > Papers