Original title: Properties of Erbium-Doped Gallium Nitride Films Prepared by RF Magnetron Sputtering in Microwave and Optical Technology
Translated title: Magnetron Sputtering in Microwave and Optical Technology
Authors: Prajzler, V. ; Schröfel, J. ; Hüttel, I. ; Špirková, J. ; Machovič, V. ; Oswald, J. ; Studnička, V. ; Novotná, M. ; Peřina, Vratislav
Document type: Proceedings
Conference/Event: Proceedings of SPIE, Ostrava (CZ), 2003-08-11 / 2003-08-15
Year: 2004
Language: eng
Series: 294-297
Abstract: [eng] [cze]
The paper describes the preparation and properties of gallium nitride layers with erbium content. Vlastnosti Galium nitridových vrstev dopovaných erbiem připravených rf magnetronovým naprašováním a jejich vlastnosti v mikrovlnné a optické technologii.
Keywords: erbium; gallium nitride; magnetron sputtering
Project no.: CEZ:AV0Z1048901 (CEP), GA104/03/0385 (CEP)
Funding provider: GA ČR

Institution: Nuclear Physics Institute AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0012822

Permalink: http://www.nusl.cz/ntk/nusl-19960


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Research > Institutes ASCR > Nuclear Physics Institute
Conference materials > Proceedings