Original title:
Vlnovodné ZnO a BaTiO3 tenlé vrstvy vytvořené laserovou depozicí
Translated title:
Waveguiding ZnO and BaTiO3 thin films fabricated by laser deposition
Authors:
Jelínek, Miroslav ; Kocourek, Tomáš ; Mazingue, T. ; Escoubas, L. ; Flory, F. Document type: Papers Conference/Event: O.K. 2003, Praha (CZ), 2003-10-21 / 2003-10-22
Year:
2003
Language:
cze Abstract:
[cze][eng] Byly studovány depoziční konfigurace pro růst tloušt'kové homogenních tenkých vrstev na podložkách o rozměrech až 3cmX3cm. KrF laserovou ablací byly deponovány vysoce kvalitní tenké vrstvy ZnO a BaTiO3 .Jejich optické vlastnosti byly měřeny metodou módové spektroskopie.Various deposition configurations for deposition of large area homogenous films (3x3c 2 ) were studied. High quality ZnO and BaTiO3 films were deposited by KrF laser ablation. Optical properties by method of mode spectroscopy were measured.
Keywords:
BaTiO 3; laser deposition; thin films; waveguiding films; ZnO Project no.: CEZ:AV0Z1010914 (CEP), IAA1010110 (CEP), LN00A015 (CEP) Funding provider: GA AV ČR, GA MŠk Host item entry: Optické komunikace 2003, ISBN 80-86742-03-2
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0009846