Original title: Photonometers for coating and sputtering machines
Authors: Oupický, Pavel ; Jareš, Daniel ; Václavík, Jan ; Vápenka, David
Document type: Papers
Conference/Event: OaM 2012 International Conference on Optics and Measurement, Liberec (CZ), 2012-10-16 / 2012-10-18
Year: 2012
Language: eng
Abstract: The concept of photonometers (alternative name of optical monitor of a vacuum deposition process)for coating and sputtering machines is based on photonometers produced by companies like SATIS or HV Dresden. Photometers were developed in the TOPTEC centre and its predecessor VOD (Optical Development Workshop of Institut of Plasma Physics AS CR) for more than 10 years. The article describes current status of the technology and ideas which will be incorporated in next development steps. Hardware and software used on coating machines B63D, VNA600 and sputtering machine UPM810 is presented.
Keywords: photonometers
Project no.: ED2.1.00/03.0079
Funding provider: GA MŠk
Host item entry: OaM/ 2012/ Optics and Measurement International Conference. Conference Proceedings, ISBN 978-80-87026-02-1

Institution: Institute of Plasma Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0230678

Permalink: http://www.nusl.cz/ntk/nusl-170406


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Research > Institutes ASCR > Institute of Plasma Physics
Conference materials > Papers