Original title: Perspectives in diamond thin film technology
Authors: Kromka, Alexander
Document type: Papers
Conference/Event: Winter Education Seminar /3. /, Rokytnice nad Jizerou (CZ), 2012-02-01 / 04.02. 2012
Year: 2012
Language: eng
Abstract: Synthetic diamond thin films are routinely grown over world not only for basic research but also for industrial uses. At the Institute of Physics (IoP), diamond thin films are grown since 2002. The first installed deposition system is base on microwave plasma enhanced chemical vapor deposition (CVD) in hydrogen reach gas mixture (<2% methane diluted in hydrogen). This system is well suitable for fast growth of high quality diamond films up to 5 cm in diameter. The main advance of the system is cavity like resonator which allows running stable CVD process for several days at relatively high pressures (>200 mbar).
Keywords: growth of NCD; MW-PECVD; nanocrystalline diamond; nucleation of NCD
Project no.: GBP108/12/G108 (CEP), IAAX00100902 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: Proceedings of the 3rd Winter Education Seminar in Rokytnice nad Jizerou 2012, ISBN 978-80-260-3425-4

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225882

Permalink: http://www.nusl.cz/ntk/nusl-161440


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers