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Original title:
Review of nanocrystalline diamond film deposition on silicon and glass substrates down to 400 °C
Authors: Potocký, Štěpán ; Babchenko, Oleg ; Ižák, Tibor ; Varga, Marián ; Kromka, Alexander ; Rezek, Bohuslav ; Michalka, M.
Document type: Papers
Conference/Event: Potential and Applications of Surface Nanotreatment of Polymers and Glass 2012 (PASNPG 2012), Brno (CZ), 2012-10-15 / 2012-10-17
Year: 2012
Language: eng
Abstract: We present an overview of a nanocrystalline diamond (NCD) films deposition on silicon and glass substrates by microwave plasma CVD in hydrogen-based gas mixture. The temperature plays a crucial parameter as the diamond growth process is temperature controlled. Use of temperature sensitive substrates demanded reducing substrate temperature. Natural decrease of deposition rate resulted in search of new or nonstandard process parameters which could at least minimize or compensate it. Addition of oxygen containing gasses was found to improve film quality, and increasing deposition speed. Moreover improvement in pre-treatment of foreign substrates allowed deposition of fully closed films in less then 100 nm. Low thickness of NCD always favorable due to lattice mismatch between substrate material and NCD film. Successful adoption of NCD film deposition on silicon and glass allowed us to study surface chemical modification for protein attachment and DNA immobilization.
Keywords: nanocrystalline diamond; NCD; surface chemical modification
Project no.: CEZ:AV0Z10100521 (CEP), GAP205/12/0908 (CEP), GAP108/12/0891 (CEP)
Funding provider: GA ČR, GA ČR
Host item entry: Potential and applications of surface nanotreatment of polymers and glass 2012 - Book of extended abstracts, ISBN 978-80-210-5979-5
Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0217865
Permalink: http://www.nusl.cz/ntk/nusl-150176
The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
Authors: Potocký, Štěpán ; Babchenko, Oleg ; Ižák, Tibor ; Varga, Marián ; Kromka, Alexander ; Rezek, Bohuslav ; Michalka, M.
Document type: Papers
Conference/Event: Potential and Applications of Surface Nanotreatment of Polymers and Glass 2012 (PASNPG 2012), Brno (CZ), 2012-10-15 / 2012-10-17
Year: 2012
Language: eng
Abstract: We present an overview of a nanocrystalline diamond (NCD) films deposition on silicon and glass substrates by microwave plasma CVD in hydrogen-based gas mixture. The temperature plays a crucial parameter as the diamond growth process is temperature controlled. Use of temperature sensitive substrates demanded reducing substrate temperature. Natural decrease of deposition rate resulted in search of new or nonstandard process parameters which could at least minimize or compensate it. Addition of oxygen containing gasses was found to improve film quality, and increasing deposition speed. Moreover improvement in pre-treatment of foreign substrates allowed deposition of fully closed films in less then 100 nm. Low thickness of NCD always favorable due to lattice mismatch between substrate material and NCD film. Successful adoption of NCD film deposition on silicon and glass allowed us to study surface chemical modification for protein attachment and DNA immobilization.
Keywords: nanocrystalline diamond; NCD; surface chemical modification
Project no.: CEZ:AV0Z10100521 (CEP), GAP205/12/0908 (CEP), GAP108/12/0891 (CEP)
Funding provider: GA ČR, GA ČR
Host item entry: Potential and applications of surface nanotreatment of polymers and glass 2012 - Book of extended abstracts, ISBN 978-80-210-5979-5
Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0217865
Permalink: http://www.nusl.cz/ntk/nusl-150176
The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers
Record created 2013-02-07, last modified 2021-11-24