Název: Nanometrology coordinate measurement machines uncertainties caused by frequency fluctuations of the laser
Autoři: Hrabina, Jan ; Lazar, Josef ; Číp, Ondřej
Typ dokumentu: Příspěvky z konference
Konference/Akce: NANOCON 2012. International Conference /4./, Brno (CZ), 2012-10-23 / 2012-10-25
Rok: 2012
Jazyk: eng
Abstrakt: One of considerable sources of displacement measurement uncertainty in nanometrology systems such as multidimensional interferometric positioning for local probe microscopy is the influence of amplitude and especially frequency noise of a laser source which powers the interferometers. We investigated the noise properties of several laser sources suitable for interferometry for micro- and nano-CMMs (coordinate measurement machines) and compared the results with the aim to find the best option. The influences of amplitude and frequency fluctuations were compared together with the noise and uncertainty contributions of other components of the whole measuring system. Frequency noise of investigated laser sources was measured by two approaches – at first with the help of frequency discriminator (Fabry-Perot resonator) converting the frequency (phase) noise into amplitude one and then directly through the measurement of displacement noise at the output of the interferometer fringe detection and position evaluation. Both frequency noise measurements and amplitude noise measurements were done simultaneously through fast and high dynamic range synchronous sampling to have the possibility to separate the frequency noise and to compare the recorded results.
Klíčová slova: atomic force microscopy; frequency discriminator; interferometry; laser noise; nanometrology
Číslo projektu: GPP102/11/P820 (CEP), GA102/09/1276 (CEP), KAN311610701 (CEP), ED0017/01/01, LC06007 (CEP), TA02010711 (CEP), EE2.4.31.0016
Poskytovatel projektu: GA ČR, GA ČR, GA AV ČR, GA MŠk, GA MŠk, GA TA ČR, GA MŠk
Zdrojový dokument: NANOCON 2012, 4th International Conference Proceedings, ISBN 978-80-87294-32-1

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0215563

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-135489


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference