Original title:
Diamond thin film development and SIMS analysis on various substrates
Authors:
Vincze, A. ; Michniak, P. ; Haško, D. ; Michalka, M. ; Varga, Marián ; Dobročka, E. Document type: Papers Conference/Event: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Year:
2011
Language:
eng Abstract:
The contribution shows the possibilities of the diamond growth on various substrates. The thin film samples were prepared using hot filament CVD. The analysis of the diamond coatings were done by various methods. SEM, XRD, Raman spectrometry and SIMS were done in order to characterize the samples. The results of the diamond thin films are discussed.
Keywords:
diamond thin film; SIMS analylis Project no.: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), MEB0810081 (CEP) Funding provider: GA MŠk, GA MŠk Host item entry: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0208104