Original title: Influence of CO.sub.2./sub. concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system
Authors: Domonkos, M. ; Ižák, Tibor ; Babchenko, Oleg ; Kromka, Alexander ; Hruška, Karel
Document type: Papers
Conference/Event: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Year: 2011
Language: eng
Abstract: The diamond films were deposited in a pulsed linear antenna microwave plasma system. The influence of CO2 addition into the standard CH4/H2 gas mixture on the diamond film morphology was investigated. The concentration of CO2 varied from 0% up to 80% in CO2/CH4/H2 gas mixture. The film morphology, the growth rate and the ratio of sp3/sp2 carbon bonds were investigated. It was found that increasing of CO2 concentration resulted in enhanced growth rate (from 20 up to 36 nm/h). However, at very high CO2 concentrations (>40%) dominates etching instead of growth process. Moreover, we found that increasing of CO2 enhances the diamond film quality.
Keywords: CO2 addition; growth rate; large area growth; nanocrystalline diamond; Raman Spectroscopy; SEM
Project no.: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), IAAX00100902 (CEP), MEB0810081 (CEP)
Funding provider: GA MŠk, GA AV ČR, GA AV ČR, GA MŠk
Host item entry: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0208091

Permalink: http://www.nusl.cz/ntk/nusl-109899


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