Original title: Katodové nanostruktury v MEMS aplikacích
Translated title: Cathode nanostructures in MEMS applications
Authors: Pekárek, Jan ; Vrba, Radimír (referee) ; Ficek, Richard (advisor)
Document type: Master’s theses
Year: 2008
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Abstract: [cze] [eng]

Keywords: anodic bonding; carbon nanotubes; field emission; Fullerenes; Micro-Electro-Mechanical Systems.; plasma enhanced chemical vapor deposition; pressure sensor; anodické pájení; emise elektrickým polem; Fullereny; Mikro-Elektro-Mechanické Systémy.; plazmochemická depozice z plynné fáze; tlakový senzor; uhlíkové nanotrubice

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/1093

Permalink: http://www.nusl.cz/ntk/nusl-582089


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2024-04-02, last modified 2024-04-03


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